SENSIRION SFC6000D-50SLM

SFC6000D-50SLM is a digital mass flow controller. This measures gas mass flow by the calorimetric principle based on heat transfer. A heater element on a thermally insulated membrane and two thermopiles up-stream and downstream are integrated on a single silicon chip. In the presence of gas flow, the temperature distribution up and downstream is disturbed. This asymmetry is then measured. The measurement area as well as the A/D converter and further signal processing are based on a single chip using CMOS standard processes. Moreover, the same chip also takes over the function of a microprocessor in a standard mass flow controller, directly regulating the valve.