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SENSIRION SFC5500-50SCCM
MASS AIR FLOW SENSOR, 10BAR, 50CCM
- Manufacturer:
- SENSIRION SENSIRION
- Manufacturer Part No:
- SFC5500-50SCCM
- Order Code:
- 3972511
-
-
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- Technical Datasheet:
- SFC5500-50SCCM Datasheet
- ECAD / MCAD
-
Product Range Selector (CMOSens SFC5500 Series)
See all from this product rangeProduct Overview
SFC5500 series versatile mass flow controller represent the culmination of Sensirion’s excellent 20-year track record in precision control of gas flow. The sensor is based on microthermal measurement principle and makes use of Sensirion’s proven CMOSens® MEMS technology. This allowed us to build a radical mass flow controller/meter with best-in-class performance and excellent reliability, which unlike most other devices on market, does not drift and does not require in-service re-calibration. Thanks to exceptionally high control range enabled by CMOSens® MEMS flow sensor, SFC5500 series can cover multiple flow ranges of a traditional mass flow controller/meter in a single device. Coupled with multi-gas calibration and exchangeable fittings, this series is first mass flow controller on market available as standard off-the-shelf products suitable for applications in medical, analytical and industrial sectors, bioreactors, chemical, plastics and glass industry, semiconductors.
- Flow rates up to 50sccm/0.05slm
- Suitable for applications where best accuracy, highest speed and widest dynamic range are needed
- Excellent accuracy and repeatability (0.8% / 0.1% of setpoint respectively)
- Very wide control range (
0.1% - 100% full scale), ultra-fast settling time ( 100ms) - G ¼″ flange compatible with a broad range of connectors: e.g. Swagelok, Legris, Festo
- Calibrated for multiple gases (Air, N2, O2, H2, He, CH4, N2O, Ar, CO2)
- Digital interface with temperature-compensated output, ultra-fast settling time (
100ms) - Pressure resistance up to 10 bar, mean time between failures (MTBF) 169 years
- No drift and no re-calibration required in the field, NIST-traceable calibration
- EK-F5x evaluation kit for quick and easy testing
Product Information
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- :
- 0.05cc/min
- :
- 50cc/min
- :
- 14V
- :
- 26.4V
- :
- 0.8%
- :
- CMOSens SFC5500 Series
Technical Documents (7)
Available for back order
More stock available to supplier lead times which is approximately 2/10/25
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¥232,534.71
(
¥255,788.18
Inc. JCT)
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| 1+ | ¥232,534.71 (¥255,788.18) | ( ) |
| 5+ | ¥215,329.97 (¥236,862.97) | ( ) |
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